JPS6166355U - - Google Patents

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Publication number
JPS6166355U
JPS6166355U JP1984149960U JP14996084U JPS6166355U JP S6166355 U JPS6166355 U JP S6166355U JP 1984149960 U JP1984149960 U JP 1984149960U JP 14996084 U JP14996084 U JP 14996084U JP S6166355 U JPS6166355 U JP S6166355U
Authority
JP
Japan
Prior art keywords
vram
ion
ion beam
dots
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984149960U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312348Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149960U priority Critical patent/JPS6312348Y2/ja
Publication of JPS6166355U publication Critical patent/JPS6166355U/ja
Application granted granted Critical
Publication of JPS6312348Y2 publication Critical patent/JPS6312348Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
JP1984149960U 1984-10-03 1984-10-03 Expired JPS6312348Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149960U JPS6312348Y2 (en]) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149960U JPS6312348Y2 (en]) 1984-10-03 1984-10-03

Publications (2)

Publication Number Publication Date
JPS6166355U true JPS6166355U (en]) 1986-05-07
JPS6312348Y2 JPS6312348Y2 (en]) 1988-04-08

Family

ID=30708124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149960U Expired JPS6312348Y2 (en]) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6312348Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011513775A (ja) * 2008-02-28 2011-04-28 カールツァイス エスエムエス ゲーエムベーハー 微細化構造を有する物体の加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS58196020A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd マスクの欠陥検査・修正方法およびその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS58196020A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd マスクの欠陥検査・修正方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011513775A (ja) * 2008-02-28 2011-04-28 カールツァイス エスエムエス ゲーエムベーハー 微細化構造を有する物体の加工方法

Also Published As

Publication number Publication date
JPS6312348Y2 (en]) 1988-04-08

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